Thermco Brute diffusion furnaces
Contributor(s): McKendry, G. (DSIR, Physics and Engineering Laboratory. Lower Hutt) | DSIR, Physics and Engineering Laboratory. Lower Hutt.Material type: BookSeries: Manual / Physics and Engineering Laboratory ; 342.Publisher: 1984 NovDescription: 99 p.Report number: PEL-M--342Subject(s): DIFFUSION FURNACES | CALIBRATION | REVISIONS | RENOVATING
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62 figs; Includes: Thermco's Ana-Lock controllers, models 201, 321, 331, 421, 431, 40 p., 39 figs; and: Brute diffusion furnace manual, 74 p.
This manual describes the refurbishing, modification, and calibration of 3 Thermco diffusion furnaces for use in Physics and Engineering Laboratory's silicon fabrication facility. Furnaces nos. 2 and 3 were purchased in late 1982 while furnaces no. 1 was purchased in late 1983